| 摘要 |
PROBLEM TO BE SOLVED: To precisely detect a leak, without changing a closed system on the side of a master, even if a work is changed. SOLUTION: First opening and closing valves 4a, 4b and work capsules 5a, 5b are connected to branching passages 12a, 12b. Second opening and closing valves 7a, 7b, a volume changer 30 and a tank 40 are connected to auxiliary passages 16a, 16b on the downstream side of the first opening and closing valves. In an air leak testing mode, in a state where the valves 7a, 7b are closed and that the valves 4a, 4b are open, a test pressure is supplied, and a very small leakage of a work W is detected, on the basis of a differential pressure sensor 6 after the first opening and closing valves are closed. After the second opening and closing valves are opened, a large leakage of the work W is detected on the basis of the sensor 6. In a volume change mode, in which a leakless work W is used, the valves 7a, 7b are opened, a motor 20 is driven in such a way that the detected differential pressure of the sensor 6 becomes zero, to adjust the volume of the volume changer 30.
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