| 摘要 |
PROBLEM TO BE SOLVED: To measure fine vibration of an object to be measured at a high accuracy. SOLUTION: A laser emission process S1 is provided to emit a laser light to an object to be measured and a return light receiving process S2, to receive return light having a Doppler frequency corresponding to the speed of the object, while being reflected on the object. In a self-mixing process S3, an oscillation is performed when light is received in the return light receiving process S2, to accomplish a self-mixing of new emission light for generating a self frequency, corresponding to the change in a resonator occurring up to the reception of the return light after the emission of the laser light and the return light having the Doppler frequency. A vibration information output process S4 is provided, to output a beat wave having the Doppler frequency of the object generated in the self mixing process S3 overlapped with the self frequency and information obtained by a signal processing of the beat wave as vibration information of the object.
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