| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrode forming method for surface acoustic wave element, with which the electrode of high power resistance can be formed through simple processes. SOLUTION: A resist film 11, formed on a piezoelectric substrate 2, is patterned, and afterwards, this piezoelectric substrate 2 is put into a vacuum tub. Next, an aluminium film 8 is formed on the resist film 11 through electron beam vapor deposition. Continuously, a vapor deposition source is switched to titanium, pressure in the vacuum tub is increased, a side face protecting film 12 composed of titanium nitride is formed on the aluminium film 8 in a gaseous nitrogen atmosphere through electron beam vapor deposition, and the upper surface and both the side faces of the aluminium film 8 are covered with the side face protecting film 12. Afterwards, an electrode is provided by removing the unwanted aluminium film 8 and side face protecting film 12, together with the resist film 11.
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