| 摘要 |
PROBLEM TO BE SOLVED: To provide an exposure controller which controls a laser to expose an object to be exposed to laser light with a target exposing energy without causing exposure errors at every pulse, even when characteristic variation occurs in the charging voltage and output energy of a laser. SOLUTION: This exposure controller which controls the exposure of a device which exposes an object to be exposed to pulsed laser light by emitting the pulsed laser light a plurality of times by using a pulse laser as a light source is provided with a means which sets a target exposing energy at every pulse of the pulse laser, a means which controls the output energy of the laser at every pulse based on the target exposing energy, and a means which detects the exposing energy at every pulse of the laser. The controller is also provided with a feedback system which decides the charging voltage of the laser by means of the output energy control means from the target exposing energy and past actual exposing energy. |
