| 摘要 |
PROBLEM TO BE SOLVED: To provide an automatic transportation system wherein, with layout being more compact, a loss related to object transportation time and that related to reduced operation time caused by facility stop are reduced for improved throughput. SOLUTION: Carrier delivery parts 18a-18x are aligned at the end parts of a plurality of process chambers 10a-10x. A transportation mechanism 12 comprises a track 26, a lift part 28, and a carrier placement stage 30, and provided lose to a vertical surface where the carrier delivery parts 18a-18x are arranged. A carrier 16 is placed on the carrier placement stage 30, with the carrier housing a plurality of wafers. The lift part 28 travel on the track 26 while the carrier placement stage 30 is raised/lowered with the lift part 28, so that the carrier 16 is transported to a specified carrier delivery part 18b, and then carry-in/carry-out ports 20a and 20b are opened for the carrier 16 carrier into the process chambers 10a-10x. |
