发明名称 OPTICAL MEASURING APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide an optical measuring apparatus capable of measuring the surface configurations of two opposite lens surfaces at the same time with high speed by use of two optical heads. SOLUTION: In the optical measuring apparatus, at least one optical head for measuring the surface information of an optical member by use of interference is provided on each of at least two opposite surfaces of the optical member. Phase plates with mutually perpendicular polarization directions are disposed in the optical paths of the optical heads or in optical paths extending from the optical heads to the surfaces of the optical member, to prevent a light beam from one of the optical heads from impinging on the light detecting means of the other optical head.
申请公布号 JP2001227908(A) 申请公布日期 2001.08.24
申请号 JP20000041673 申请日期 2000.02.18
申请人 CANON INC 发明人 OTSUKA MASARU
分类号 G01B9/02;G01B11/24;G01B11/245;G01M11/00;(IPC1-7):G01B9/02 主分类号 G01B9/02
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