SOLID RAW MATERIAL VAPORIZING VESSEL USED IN REACTOR

摘要

PROBLEM TO BE SOLVED: To provide a solid raw material vaporizing vessel capable of preventing the powder from being blown up by the pressure fluctuation in the vessel and providing the sufficient steam amount, with respect to the vaporization vessel for hearing and vaporizing the sublimatable power solid material to be sent to a rector. SOLUTION: This solid raw material vaporizing vessel used in a reactor is divided into a solid material storage chamber and raw material gas reserving chamber having a carrier gas introduction part and a material gas sending part, and both chambers are connected by a pressure fluctuation buffer path.