| 摘要 |
PROBLEM TO BE SOLVED: To provide a positioning device having accurate positioning without giving an influence of a drive reaction force of a stage to another unit. SOLUTION: The positioning device comprises a stage movable in first and second directions on a reference surface provided on a base, a driver for generating a drive force between the base and the stage, a first structure for movably supporting the base in the first direction, and a second structure for movably supporting the first structure in the second direction. Thus, a drive reaction force is cancelled, and an accurate positioning can be conducted.
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