发明名称 |
METHOD FOR MANUFACTURING EMBOSS-TYPE STRAP STRUCTURE MOS TRANSISTOR |
摘要 |
PROBLEM TO BE SOLVED: To reduce parasitic capacitance and resistance regarding the source/ drain of a MOS transistor. SOLUTION: In the MOS transistor with emboss-type strap structure, a source region (92) and a drain region (91) are essentially insulated from a transistor substrate (51), and are connected to a transistor substrate (51) by connecting straps (94 and 95). A gate oxide layer (67) and a gate electrode (93) are formed on the substrate (51) between the two straps.
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申请公布号 |
JP2001230411(A) |
申请公布日期 |
2001.08.24 |
申请号 |
JP20010013885 |
申请日期 |
2001.01.22 |
申请人 |
SHARP CORP;SHARP MICROELECTRONICS TECHNOL INC |
发明人 |
SHIEN TEN SUU |
分类号 |
H01L29/78;H01L21/336;(IPC1-7):H01L29/78 |
主分类号 |
H01L29/78 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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