发明名称 PROCESS CONTROL DEVICE AND METHOD FOR SETTING ITS EXECUTION SCHEDULE AND MACHINE
摘要 <p>PROBLEM TO BE SOLVED: To complete a process analysis with in the minimum time and reduce burden on user. SOLUTION: This process control device is provided with a process control part 1, which prepares the process data of a device to be analyzed and the device data according to the input of process information and device information from a user, selects an execution machine 3 capable of completing a process analysis within the minimum time among a pluralarity of usable machines for analysis on the basis of the analysis execution process limit time preset by the user, the past operation status and the execution registered data, sets the virtual operation status of the machine 3, and controls the execution of the process analysis including an analysis start time according to the process contents and the virtual operation status of the machine 3, and an operation status control part 2 which controls the operation status of the machines including the machine 3.</p>
申请公布号 JP2001230169(A) 申请公布日期 2001.08.24
申请号 JP20000041280 申请日期 2000.02.18
申请人 NEC CORP 发明人 KANEKO HIROKATSU
分类号 H01L21/02;G05B19/418;G06F19/00;G06Q50/00;G06Q50/04;(IPC1-7):H01L21/02;G06F17/60 主分类号 H01L21/02
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