| 摘要 |
PROBLEM TO BE SOLVED: To provide a rotating treatment apparatus for suppressing deteriora tion of a rotary shaft due to a treatment liquid. SOLUTION: The rotating treatment apparatus comprises a rotary table 5 for mounting a material 4 to be treated on an upper surface and fixedly holding the material 4, a rotary shaft 3 coupled to a lower surface of the table 5, a cup 2 surrounding a periphery of the material 4 during rotating treatment, a bevel-like rotary shaft cover 9 conversing the periphery of the shaft 3 in the cup 2, and a discharge unit 8 for discharging the air or a liquid in the cup 2. The apparatus also comprises a clean gas introducing passage 10 for introducing the air or an inert gas for setting the interior of the cup 2 to a positive pressure in the cover 9. |
