| 摘要 |
PROBLEM TO BE SOLVED: To stably shorten the measurement waiting time generated due to dielectric absorption and to stably reduce a steady leakage electric current so as to improve the measurement accuracy of minute electric current and minute current fluctuation in a testing device for a semiconductor wafer. SOLUTION: The probe card includes a board 10 and an external connection terminal 1 arranged on the board 10, and the external contact terminal 1 is separated from the main body of the board 10 by means of conductors 3, 4 installed to the board.
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