| 摘要 |
PROBLEM TO BE SOLVED: To obtain an apparatus for centering a substrate in which flexure in the vicinity of the central part of a wafer contained in a cassette is corrected to be flat and a shifted substrate is brought close to the center. SOLUTION: The apparatus 1 for centering a substrate comprises a table 3 for mounting a cassette 2 containing a substrate P mounted on a multistage supporting arm 2A, a plurality of supports 10 advancing into the cassette mounted on the mounting table and supporting the substrate in the vicinity of the central part thereof from below, a centering arm 11 for bringing the substrate to the central side by moving horizontally from the outside to the inside of the cassette, and an elevator for elevating/lowering an elevating/ lowering frame 5 provided with the supports and the centering arm. |
