| 摘要 |
PROBLEM TO BE SOLVED: To prevent a wafer from being oxidized by substitution of nitrogen gas, and to prevent natural oxidation in an atmosphere, with no special pressure- proof structure of a case and the like. SOLUTION: There are provided a reactive oven 4 where a wafer 12 held in a boat 6 is processed, a boat housing chamber 3 which is below the reactive over and houses the boat, wafer transportation equipment 9 which is provided outside the boat housing chamber and transports the wafer into the boat, and an opening 8 which is provided on the side of wafer transportation equipment of the boat housing chamber and opened/closed by an opening/closing means. Here, the wafer transportation equipment transport the water into the boat lowered from the reactive oven into the boat housing chamber through the opening which is opened. |
