OPTICAL WAVEGUIDE DEVICE AND METHOD FOR FORMING OPTICAL WAVEGUIDE DEVICE

摘要

An optical waveguide is formed on a substrate of a material having an electro-optic effect. An intermediate layer is formed on a major surface thereof. A metal-mounted polarizer is provided on the intermediate layer above the optical waveguide. A signal electrode and a grounding electrode are formed on the substrate or a buffer layer. The intermediate layer is made of a dielectric having a composition AO>x<, B>2<O>y<, and CO>z< (where X represents a bivalent element, Y a trivalent element, Z a quadrivalent element, O oxygen, and 0>x>1, 0>y>3, 0>z>2) In another mode, an optical waveguide and buffer layer are formed on a substrate of a material having an electro-optic effect, the buffer layer is partly removed by nonreactive dry-etching to form a first opening, a metal-mounted polarizer is formed in the first opening, and a signal electrode serving as a modulating electrode and a grounding electrode are formed on the buffer layer.