发明名称 SEMICONDUCTOR SUBSTRATE AND METHOD OF MANUFACTURING SAME
摘要 A method of manufacturing a semiconductor substrate includes the steps of laminating a first substrate having a single-crystal semiconductor region with a second substrate having an insulator region, and selectively removing the portion of the first substrate of the laminated substrates where lamination strength is weak.
申请公布号 US2001016423(A1) 申请公布日期 2001.08.23
申请号 US19970914226 申请日期 1997.08.19
申请人 SAKAMOTO MASARU 发明人 SAKAMOTO MASARU
分类号 H01L21/02;H01L21/76;H01L21/762;H01L27/12;(IPC1-7):H01L21/302 主分类号 H01L21/02
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