| 摘要 |
A method for lapping a material to be lapped is provided, in which the material contacts with a surface of a rotating lapping cloth. A lapping agent containing lapping particles is employed. The lapping particles have a hardness identical or equivalent to that of the material. The hardness is adjusted by controlling a concentration of the lapping particles. A method for manufacturing the lapping particles for use in the lapping method is also provided, in which a silane and an oxygen are injected in a gaseous phase to generate porous silica particles having a desired concentration.
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