发明名称 RESIST COMPOSITION
摘要 A resist composition which comprises (A) an alkali-soluble resin, (B) an ingredient which crosslinks the alkali-soluble resin upon irradiation with actinic rays or upon irradiation with actinic rays and subsequent heating, and (C) a compound absorbing actinic rays, characterized in that the alkali-soluble resin (A) is a resin composition comprising 30 to 95 wt.% polyvinylphenol and 5 to 70 wt.% novolac resin. Also provided is a method of forming a pattern with the resist composition.
申请公布号 WO0161410(A1) 申请公布日期 2001.08.23
申请号 WO2001JP01088 申请日期 2001.02.15
申请人 ZEON CORPORATION;KASHIWAGI, MOTOFUMI;KUSUNOKI, TETURYO;MITAO, NORIYUKI 发明人 KASHIWAGI, MOTOFUMI;KUSUNOKI, TETURYO;MITAO, NORIYUKI
分类号 C08L25/18;C08L61/06;G03F7/038;(IPC1-7):G03F7/038;G03F7/26;H01L21/027 主分类号 C08L25/18
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