Semiconductor wafer rinse device

摘要

A device for rinsing batches of semiconductor wafers including a rinse vessel provided with at least one opening of overflowing water discharge, the bottom of which includes a water supply, a main outlet connected to a sewer and a recovery outlet connected to a waste water treatment plant, said at least one opening emerging into a gutter equipped with an outlet duct connected to the sewer and with a recovery duct connected to the treatment plant and said outlet duct being equipped with a controllable closing means enabling selection thereof to empty the gutter.