Method and arrangement for inspection of surfaces

摘要

The invention relates to a method and an arrangement implementing the method of inspecting the surface of an object (106), the method comprising providing a movement between the object and the arrangement for inspecting the surface of the object, the surface of the object being radiated with optical radiation. Said radiation is directed to different imaging fields (108, 110) of the surface of the object so that at least one property of each radiation is different in the different imaging fields. For the creation of image information from the same surface area of the object at different radiations, an image is produced of the imaging fields and the image information of the same surface area obtained from different imaging fields is compared and/or combined to create surface inspection information.