Method for producing three-dimensional micro-structures in a photo-lacquer, deposited on a substrate, using a focussed laser beam the wavelength of which lies above that corresponding to the lacquer's spectral sensitivity

摘要

Method for production of three-dimensional micro- structures in photo-lacquer in which the irradiation of the lacquer takes place using multi-photon processes using a focussed laser beam. The wavelength of the beam is above that of the spectral sensitivity of the lacquer.