发明名称 Liquid crystal display device, wiring substrate, and methods for fabricating the same
摘要 The liquid crystal display device (100) of the present invention includes a reflection electrode (12) on a base substrate (10). The reflection electrode (12) has a double-layer structure of a first metal layer (16) containing Mo and a second metal layer (14) containing Al formed on the first metal layer (16). By forming the first metal layer (16) so that the maximum grain size of Mo at the surface is 60 nm or less, generation of pinholes in the second metal layer (14) is suppressed. This suppresses/prevents occurrence of partial loss of the second metal layer (14) at positions surrounding the pinholes in a process such as removal of a resist pattern with an alkaline remover.
申请公布号 US2001015781(A1) 申请公布日期 2001.08.23
申请号 US20010766592 申请日期 2001.01.23
申请人 TANAKA NAOYUKI;TAKAYAMA MASAYA 发明人 TANAKA NAOYUKI;TAKAYAMA MASAYA
分类号 G02F1/1343;G02F1/13;G02F1/1335;G02F1/136;G02F1/1368;G09F9/30;H01L21/308;H01L21/3205;H01L23/52;(IPC1-7):G02F1/133 主分类号 G02F1/1343
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