PRECISION ETCHING AND COATING SYSTEM,申请号EP19970950913-传众专利搜索

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发明名称	PRECISION ETCHING AND COATING SYSTEM
摘要
申请公布号	EP0951578(B1)	申请公布日期	2001.08.22
申请号	EP19970950913	申请日期	1997.12.10
申请人	GATAN, INC.	发明人	MITRO, RICHARD, J.;ALANI, REZA;MALASZEWSKI, LESZEK
分类号	C23C14/02;C23C14/46;C23C14/56;C23F4/00;G01N1/32;H01J37/305;H01J37/317;(IPC1-7):C23C14/00	主分类号	C23C14/02
代理机构		代理人
主权项
地址

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