METHODS FOR PREPARING RUTHENIUM METAL FILMS,申请号KR1020017002541-传众专利搜索

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发明名称	METHODS FOR PREPARING RUTHENIUM METAL FILMS
摘要
申请公布号	KR20010079702(A)	申请公布日期	2001.08.22
申请号	KR1020017002541	申请日期	2001.02.27
申请人		发明人
分类号	H01L21/20	主分类号	H01L21/20
代理机构		代理人
主权项
地址

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