| 摘要 |
<p>An electrostatically controlled microshutter matrix comprised of a number of microshutters, each including a fixed support, composed of a substrate (5), an electrically conductive layer (7), as well as a movable petal (8) having one end attached to the fixed support (4) and, under the electrostatic effect induced when a voltage is applied between the petal (8) and the electrode (6), susceptible to adhering to the fixed support (4). When the electrical voltage is removed, the petal (8) returns to a curved, undeformed position, away from the respective fixed support. The various microshutters (2) are arranged in a number of spaced-out rows, one above the other, with the substrates (5) of the various microshutters of each row mutually coplanar and parallel with the substrates (5) of the microshutters (2) of the adjacent rows. <IMAGE></p> |
