Electron-emitting source, electron-emitting module, and method of manufacturing electron-emitting source

摘要

An electron-emitting source includes a substrate (11) and a coating film. The substrate is made of a material containing a metal serving as a growth nucleus for nanotube fibers as a main component, and has a plurality of through holes (13). The coating film (12) is constituted by nanotube fibers formed on a surface of the substrate and wall surfaces (14) of the through holes (13). A method of manufacturing an electron-emitting source is also disclosed.