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发明名称
DIFFUSION BARRIER MATERIALS WITH IMPROVED STEP COVERAGE
摘要
申请公布号
KR20010080412(A)
申请公布日期
2001.08.22
申请号
KR1020017005944
申请日期
2001.05.11
申请人
发明人
分类号
C23C16/34
主分类号
C23C16/34
代理机构
代理人
主权项
地址
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