| 摘要 |
PROBLEM TO BE SOLVED: To provide an ultrasonic excitation device wherein both of the opposite sides of a long-sized substrate can be cleaned at the same time and even if the substrate has a large thickness and is transported at a high speed, a high degree of cleanness can be maintained, while the size thereof can be made smaller and consumption of cleaning liquid can be reduced, and to provide an ultrasonic cleaning system equipped with the device. SOLUTION: A through hole 5 is formed at or near a position spaced apart from a surface of a waveguide body 13, on which a vibrator 4 is disposed, by integer multiples of half-wave length of ultrasonic vibration, while an upper waveguide part 13a having a height H1 of integer multiples of half-wave length (λ/2) of ultrasonic vibration is provided. In addition, a deflection vibration part 13b which is connected to the part 13a across the hole 5 and has a height H3 of one quarter of wavelength (λ/4) or less of ultrasonic wave is provided. Vertical vibration is introduced into the hole 5 from the part 13a, while defection vibration is introduced into the hole 5 from the part 13b. The waveguide body 13 is put into a cleaning liquid 50 so that at least the upper end 5b of the hole 5 is submerged in the liquid 50, and the long-sized substrate is inserted into the hole 5.
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