Protective fullerene (C60) packaging system for microelectromechanical systems applications

摘要

The invention involves a method for locating the probe of a scanning tunneling micrograph a predetermined distance from its conducting surface, and specifically the deposition of a monolayer of fullerene C60 onto the conducting plate. The Fullerene C60 molecule is approximately spherical, and a monolayer of fullerene has a thickness of one nanometer. By providing a monolayer of fullerene on the conducting surface and locating the probe on the surface of the monolayer, a distance of one nanometer can be established between the probe tip and the conducting surface.