RESOLUBLE ACID CROSSLINKING TYPE POLYMER AND PHOTOSENSITIVE RESIN COMPOSITION OBTAINED BY COMBINING THE POLYMER WITH PHOTOACID GENERATOR

摘要

PROBLEM TO BE SOLVED: To obtain a resoluble acid crosslinking type polymer compound which is a new homo- or copolymer having characterictics of crosslinking (curing) in an acidic atmosphere to give a crosslinked compound to be decomposed into a compound of readily removable chemical structure by a relatively low- temperature heating. SOLUTION: This resoluble acid crosslinking type polymer compound is a homo- or copolymer containing a chemical structure consisting of a chemical group having a chemical structure of forming a crosslinking at the terminal in an acidic atmosphere, a tertiary carbon directly bonded to the chemical group and an oxygen of an ester bond directly bonded to the tertiary carbon or of an ether bond directly bonded to an aryl group as at least a part of a constitutent unit of side chain.