| 摘要 |
A wafer carrying fork on which a wafer rests and carried and which comprises a wafer resting surface (2) provided on the top surface of a wafer carrying fork (1), and two steps (3, 4) provided on the outer sides of the wafer resting surface (2) in a stepwise manner and having a height to width ratio of 1:0.5 to 1:2. Accordingly, it is possible to have a wafer (6) surely rest on the wafer carrying fork (1), even when the wafer (6) gets out of position in a wafer cassette, to convey it without failing.
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