发明名称 RESIN COMPOSITION FOR FORMING MULTI-LAYERED WIRING WITH VOID AND MULTI-LAYERED WIRING WITH VOID USING THE SAME
摘要 PROBLEM TO BE SOLVED: To obtain a resin composition capable of utilizing a conventional multi-layered wiring process and a unit used therefor in forming a multi-layered wiring having the least static capacity between the wires. SOLUTION: This resin composition for multi-layered wiring with void contains, as essential components, a heat vaporizable component (A) and a heat resistant resin or its precursor having a glass transition temperature higher than the heat vaporization temperature of a polymer of the component (A), and a multi-layered wiring with void is provided by using the same.
申请公布号 JP2001226599(A) 申请公布日期 2001.08.21
申请号 JP20000041772 申请日期 2000.02.18
申请人 SUMITOMO BAKELITE CO LTD 发明人 KATSUMURA AKIFUMI
分类号 H01L23/522;C08G73/10;C08G73/22;C08L101/00;H01L21/768;(IPC1-7):C08L101/00 主分类号 H01L23/522
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