STRUCTURE OF DOWNSCALED SURFACE WAVE PLASMA EQUIPMENT

摘要

PURPOSE: A structure of downscaled surface wave plasma equipment is provided to maximize the use of a space, by rearranging constitutional factors protruded in a lateral direction and in a rear direction. CONSTITUTION: A pump(220) is transferred to be installed in a vacuum chamber. A VAT valve(210) is transferred to the center by the transferred and installed pump. A micro power generator is transferred to be installed in a position higher than the vacuum chamber. The micro power generator and the vacuum chamber are connected with a waveguide.