发明名称 |
Method for cleaning semiconductor device |
摘要 |
It is an object of the present invention to provide a cleaning method of and a cleaning apparatus for removing organic matters such as phthalates that have deposited on the surface of a semiconductor substrate while restraining the growth of a natural oxide film. The present invention provides a method of cleaning a semiconductor substrate, which comprises irradiating a semiconductor substrate contaminated by organic matters such as phthalic acid, phthalate and derivatives thereof with vacuum ultraviolet light having a wavelength within a range from 165 to 179 nm in an atmosphere of oxygen or air that is introduced from an O2 or air intake port, thereby decomposing and removing the contaminant.
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申请公布号 |
US6277767(B1) |
申请公布日期 |
2001.08.21 |
申请号 |
US20000541612 |
申请日期 |
2000.04.03 |
申请人 |
NEC CORPORATION;USHIO DENKI KABUSHIKI KAISYA |
发明人 |
SHIRAMIZU YOSHIMI;MITAMA MITSUAKI |
分类号 |
H01L21/304;B08B7/00;H01L21/28;H01L21/306;(IPC1-7):H01L21/302;H01L21/26;H01L21/42;B08B3/12 |
主分类号 |
H01L21/304 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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