DEVICE AND METHOD FOR COATING SLURRY LIQUID

摘要

PROBLEM TO BE SOLVED: To provide a slurry liquid coating device having high utilizing efficiency of a slurry liquid and capable of uniformly applying. SOLUTION: The device 3 has a base table 4 placing a substrate 1, a nozzle member 6 for supplying the slurry liquid and a moving means 5 for moving in 3 directions crossing the nozzle member 6 at a right angle. A slit is continuously formed along the longitudinal direction on the bottom surface of the nozzle member 6. The direction of the slit is in parallel to the substrate 1 and is across the horizontal movement direction of one side at a right angle. The slurry liquid is supplied to the nozzle member 6 by a slurry liquid supply means. The nozzle member 6 is moved in the direction crossing the slit at a right angle while discharging the slurry liquid from the slit of the nozzle member 6 to coat the slurry liquid with a prescribed thickness on the substrate 1. Next, the substrate 1 is rotated by a rotary draining device to blow off the slurry liquid and a uniform film of the slurry is formed on the surface and dried. The high viscous slurry liquid is spread on the surface of the substrate with the small quantity to improve the utilizing efficiency of the slurry liquid. The excellent coating uniformity is attained.