发明名称 Method and system for controlling robot arms of automatic guided vehicles on semiconductor wafer production line
摘要 A method of teaching a plurality of automatic guided vehicles, each of which is provided with at least a robot arm for loading and unloading an article, having the steps of: teaching an original one of the automatic guided vehicles both about reference-positional data by use of a single unpractical reference station and about practical-positional data belonging to at least a practical station by use of the at least practical station; and both supplying the automatic guided vehicles, except for the original one, with common data identical with the practical-positional data taught to the original one, and further teaching the automatic guided vehicles, except for the original one, about individual positional-compensating data by use of the single unpractical reference station so as to individually compensate the common data with the individual positional-compensating data for compensation to individual instrumental errors of the automatic guided vehicles. The positional-compensating data are concerned with a difference of each of the at least remaining one from the original one in a relative-position between a hand of the robot arm and a reference point on the automatic guided vehicle to be referred for stopping the automatic guided vehicle at a predetermined stop position in front of the at least practical station.
申请公布号 US6278905(B1) 申请公布日期 2001.08.21
申请号 US19990238409 申请日期 1999.01.28
申请人 NEC CORPORATION 发明人 SAITO DAISUKE
分类号 B23P19/00;B25J5/00;B25J5/02;B25J9/22;B25J13/00;B65G1/00;B65G43/00;G05B19/19;G05B19/418;G05B19/42;G05D1/02;H01L21/02;H01L21/677;(IPC1-7):G05B19/04 主分类号 B23P19/00
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