发明名称 |
Method of manufacturing optical disc master plate |
摘要 |
A method of manufacturing an optical disc master plate, comprises the steps of: forming a photoresist layer having an electrically conductivity on a substrate; and irradiating the photoresist layer with a laser beam, using an optical system capable of holding a solid immersion lens on a flying head.
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申请公布号 |
US6277545(B1) |
申请公布日期 |
2001.08.21 |
申请号 |
US19990231904 |
申请日期 |
1999.01.14 |
申请人 |
PIONEER ELECTRONIC CORPORATION |
发明人 |
IIDA TETSUYA;HIGUCHI TAKANOBU;KASONO OSAMU |
分类号 |
G11B7/135;G03F7/09;G11B7/12;G11B7/26;(IPC1-7):G11B7/135 |
主分类号 |
G11B7/135 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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