Method for manufacturing an SOI wafer

摘要

A method including: forming doped regions on a monocrystalline substrate; growing an epitaxial layer; forming trenches in the epitaxial layer extending to the doped regions; anodizing the doped regions in an electro-galvanic cell to form porous silicon regions; oxidizing the porous silicon regions; removing the oxidized porous silicon regions to form a buried air gap; thermally oxidizing the substrate to grow an oxide region from the walls of the buried air gap and the trenches, until the buried air gap and the trenches themselves are filled.