| 摘要 |
PURPOSE:To surely and accurately recognize a mark by solving a technical problem that the mark illumination light to a substrate is applied directly and vertically to the substrate. CONSTITUTION:The mark illumination light is directed to the mark surface of a substrate (K) on a stage 21 with reflection of a light passing mirror 7, and the reflected light of the mark is transmitted through a projecting lens 20 from the light passing mirror 7, thereby forming an image on a mask (M) to project the mark illumination light onto the mark of the substrate with an adequate illumination intensity, so that even the mark of low reflectance may be surely recognized and the shape of the mark of the substrate (K) may be accurately recognized. |
