| 摘要 |
PURPOSE: A substrate transfer apparatus is provided to form a hermetically-closed space integrated between a normal substrate processing apparatus and a substrate transfer container and a substrate transfer method capable of transferring a substrate between the substrate transfer container and the substrate processing apparatus without contaminating the substrate by adsorption of gas molecules in the atmosphere. CONSTITUTION: The transfer apparatus is provided with a main body(11) in a box-like shape, an upper opening(12) and a sidewall opening(13) provided to the main body(11), a gas introducing pipe(14) and an exhaust pipe(15) connected to the main body(11), an opening/closing mechanism(16) installed at inside of the main body(11), a cassette elevator(17) and a transfer arm(18). The main body(11) is provided with a size for containing a cassette(S) holding a substrate(W). An inner wall of the main body(11) is constituted by a metal and a wall face thereof at a height position the same as that of the side wall opening(13) is constituted by a transparent material.
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