| 摘要 |
PURPOSE: To accurately and rapidly detect the position of a mark formed on an object. CONSTITUTION: After an imaging device AS imaged marks MX, MY under imaging conditions, comprising a plurality of different defocus states, a processing device 20, obtains relation between an image of an imaged mark and a defocus amount, that is, the changes in an imaged mark image caused by change of a defocus amount. A mark position, that is, a mark position to be obtained by using a mark image in a focus state, is detected from relation between an obtained imaged mark image and a defocus amount. As a result, even if a step between a line pattern and a space pattern in a mark image imaged in the focus state is small, the position of a mark can be detected accurately.
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