| 摘要 |
PURPOSE:To position and hold a mask with high accuracy even when the mask is tilted to the horizontal direction by a method wherein a conical-hole part is pressed first. CONSTITUTION:Individual clamp arms 3a to 3c are turned to the side on which a mask is pressed, they are then moved slightly to the side of a mask chuck, and a mask frame 1 is captured by the mask chuck 2. In this state, the distance between hemispherical protrusions 2a, 2b and the clamp arms 3a, 3b is smaller than the thickness of a mask-holding part at a conical-hole part 1a and a V- groove 1b. As a result, a mask is supported by the protrusions at two parts and it is set to a suspended state. At this time, only thr clamp arm 3a is moved further to the side of the mask chuck, and it presses the conical-hole part 1a and the protrusion part 2a which are coupled. Thereby, the influence of an excessive restraint due to a frictional force and due to the own weight of the mask is avoided, the mask can be positioned and fixed precisely, and, at the same time, it is possible to restrain the deformation of a pattern on the mask from being caused. |
