| 摘要 |
<p>PURPOSE: A method for dispatching a semiconductor lot to fabricating equipment is to provide a precise and rapid conveyance schedule, by embodying a closed loop system which makes a dispatch determination and feeds back proper information to contribute to a future dispatch determination. CONSTITUTION: Measurement standard data supplying capacity measurement regarding a plurality of machines(18) is received. States of respective machines are determined according to the measurement standard data. At least one lot(22) to dispatch is received, wherein each lot has a lot type and each lot type is associated with each model among a plurality of models. A proper lot type is selected regarding respective models associated with the respective machines based upon the state of the machine. A proper model is selected according to the last run of the model, a new model, exchange cost of a lot type and the time after the machine state. A collision between the selected lot type and the proper model when a lot insufficient for the selection processes is used, is solved. Each lot is allotted to respective machines according to the proper mode and the proper lot type.</p> |
