| 摘要 |
<p>PURPOSE:To enhance the electron emitting efficiency and emission amount of an electron emitting element, which has a conductive film including an electron emission part between two opposing electrodes, by inserting a specific process in the manufacture of the element. CONSTITUTION:An electron emitting element has a conductive film 4 including an electron emission part 3 between two opposing electrodes 5, 6. At the manufacture of the element, the conductive film 4 is exposed to an atmosphere with carbonic compound (for example, after a current feed forming process in which an electron emission part 3 is formed in the film 4 in a vacuum system, a vacuum pump is stopped, followed by putting in the pump oil atmosphere), and then a voltage is impressed on the film 4 as an activating process. Preferably, the impression of the voltage is made as repetitive impresssons of a pulse voltage whose wave height is over the voltage control type negative resistance characteristic region.</p> |
