| 摘要 |
PURPOSE: To provide an excimer laser device capable of stable oscillation at a repetition frequency of at least 4 kHz as a high frequency which is not used in the conventional case. CONSTITUTION: This excimer laser device consists of a laser chamber (1) in which laser gas is sealed, a pair of main discharge electrodes (2) arranged in the chamber (1), and a cross flow fan (3) in the chamber (1) which makes the laser gas circulating stream flowing in at least a part between the main discharge electrodes (2). In the laser device whose repetition frequency is at least 4 kHz, the diameter of the cross flow fan (3) is at most 150 mm, and the peripheral velocity is at least 25.0 m/s.
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