发明名称 |
Processing line having means to monitor crystallographic orientation |
摘要 |
Apparatus for continuously moving a substrate and coating the substrate with a crystalline coating has at least one means for monitoring the crystalline orientation of the coating, either continuously or periodically. |
申请公布号 |
AU3805501(A) |
申请公布日期 |
2001.08.20 |
申请号 |
AU20010038055 |
申请日期 |
2001.02.07 |
申请人 |
MICROCOATING TECHNOLOGIES, INC. |
发明人 |
SHARA S. SHOUP;ANDREW TYE HUNT |
分类号 |
C23C16/52;C23C16/54;C30B23/02;C30B25/02;C30B25/16;H01L39/24 |
主分类号 |
C23C16/52 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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