| 摘要 |
PROBLEM TO BE SOLVED: To prevent formation of boundaries between irradiated surface and non irradiated surface and regions formed repeatedly continuously at the same position, and to improve the uniformity of a resulting semiconductor thin film when a pulse laser beam is continuously scanned. SOLUTION: The outer periphery of a condensing light shape of a laser beam is located at a position not parallel to a scanning direction. Thus, even when the beam is continuously superimposed, formation of boundaries between irradiated surface and non irradiated surface and regions formed repeatedly continuously at the same position can be improved.
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