发明名称 METHOD AND DEVICE OF MANUFACTURING SHADOW MASK
摘要 PROBLEM TO BE SOLVED: To easily analyzed causes of failures generated in the manufacturing processes of a shadow mask. SOLUTION: A semi-product of a shadow mask is manufactured by performing treatment processes in an iron band for a shadow mask including a sensitive liquid application process 12, an exposure process 13, a development/ printing process 14 and a punching process 15, and an inspection process 16. Before starting these processes, data peculiar to the iron band are set. In each process, process conditions in performing the process are measured by a process condition measuring means 32, and the measured conditions are stored in a control means, masking the conditions correspond to the data peculiar to the iron band.
申请公布号 JP2001222950(A) 申请公布日期 2001.08.17
申请号 JP20000029829 申请日期 2000.02.07
申请人 TOSHIBA CORP;TOSHIBA ELECTRONIC ENGINEERING CORP 发明人 YAMADA HIROSHI
分类号 H01J9/14;(IPC1-7):H01J9/14 主分类号 H01J9/14
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