| 摘要 |
PROBLEM TO BE SOLVED: To provide a defect inspection device capable of obtaining a matrix number accurately at high speed, and not requiring a complicated operation such as designation of a retrieval range. SOLUTION: This defect inspection device for detecting a defect position of plural test objects arranged in the longitudinal and lateral directions with a prescribed rule is equipped with a particle analytical means 201 for obtaining position coordinates of the plural test objects, a rotation angle calculation means 202 for obtaining respectively a rotation angle of a row in the lateral direction against a horizontal line of the plural test objects and a rotation angle of a row in the longitudinal direction against a vertical line based on the obtained position coordinates, a pitch size calculation means 203 for obtaining pitch sizes in the longitudinal and lateral directions of the plural test objects, and a matrix number analytical means 204 for obtaining the matrix numbers of each test object based on the obtained rotation angles and pitch sizes. |
