发明名称 METHOD FOR ADJUSTING POSITION SENSOR AND METHOD FOR ATTACHING THE SENSOR
摘要 PROBLEM TO BE SOLVED: To provide a method by which the warming-up time of a position sensor can be omitted and the linearity errors of the sensor can be eliminated by adjusting the sensor with adjustment accuracy and attaching the sensor having attaching accuracy. SOLUTION: This method for adjusting position sensor is used for adjusting a displacement amplifier 3, constituting a first position sensor that detects the position of an object to be positioned. In this method, the zero point and span of the amplifier 3 to be adjusted are adjusted, by using position-detecting signals outputted from a second displacement amplifier 8 constituting an already adjusted second position sensor, and the adjusted positions of the first and second position sensors are adjusted at the reference positioning position of the object.
申请公布号 JP2001221604(A) 申请公布日期 2001.08.17
申请号 JP20000026713 申请日期 2000.02.03
申请人 CANON INC 发明人 MAKITA YOSHINORI
分类号 H01L21/027;G01B7/00;G03F9/00;(IPC1-7):G01B7/00 主分类号 H01L21/027
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